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1 article(s) from Weirich, Paul M.

In situ growth optimization in focused electron-beam induced deposition

Paul M. Weirich,
Marcel Winhold,
Christian H. Schwalb and
Michael Huth

Beilstein J. Nanotechnol. 2013, 4, 919–926, doi:10.3762/bjnano.4.103

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Figure 1: Schematic representation of the optimization process: (a) Layer structure of FEBID deposits: m opti...

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Figure 2: Flow chart of the in situ optimization of conductance of FEBID deposits with a GA. After the initia...

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Figure 3: (a) Rate of change of conductance during the GA optimization for the W–C–O reference (green), GA-op...

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Figure 4: (a) Chemical composition of sample 1 (t_D = 100 μs), sample 2 (t_D = 0.5 μs) and sample 3 (t_D = 831 μ...

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Figure 5: Time-dependent rate of change of conductance for Pt–C deposits - The GA is applied for the optimiza...

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Full Research Paper

Published 17 Dec 2013

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